Environmental sensor. シリコン・光回路を使った環境モニタリング



New design: Si slot waveguide sensors considering the overlap of the biolayer coated on the surface with light propagation section in order to realize specific gas detection with higher sensitivity. 

The fabricated Si slot waveguide ring resonators detected CO2, meaning that the device satisfies detecting capability and compatibility with the biolayer toward specific gas sensing.

関連発表:” CO2 Detection with Si Slot Waveguide Ring Resonators toward On-chip Specific Gas Sensing” 2019 Conference on Lasers and Electro-Optics (CLEO)