{"id":1844,"date":"2021-09-01T17:02:00","date_gmt":"2021-09-01T08:02:00","guid":{"rendered":"http:\/\/tuat-chemphys.net\/?p=1844"},"modified":"2021-09-01T17:02:00","modified_gmt":"2021-09-01T08:02:00","slug":"%e5%be%ae%e7%b4%b0%e5%8a%a0%e5%b7%a5%e6%8a%80%e8%a1%93%e9%96%8b%e7%99%ba%e3%81%ae%e6%96%b0%e5%b1%95%e9%96%8b%e3%81%ab%e5%85%89-application-of-light-to-new-development-of-microfabrication-technology","status":"publish","type":"post","link":"https:\/\/tuat-chemphys.net\/?p=1844","title":{"rendered":"\u5fae\u7d30\u52a0\u5de5\u6280\u8853\u958b\u767a\u306e\u65b0\u5c55\u958b\u306b\u5149 Application of Light to New Development of Microfabrication Technology"},"content":{"rendered":"\n<p><em>\u5149\u306e\u6975\u8584\u30b7\u30fc\u30c8\u3067\u30ca\u30ce\u52a0\u5de5<\/em>   <em>\uff5e\u5fae\u7d30\u52a0\u5de5\u6280\u8853\u958b\u767a\u306e\u65b0\u5c55\u958b\u306b\u5149\uff5e<\/em><\/p>\n\n\n\n<p>\u5bae\u5730 \u51c6\u6559\u6388\u306f\u3001\u5927\u5b66\u9662\u751f\u306e\u98ef\u7530 \u60a0\u6597 \u6c0f\u3068\u4e8c\u968e\u5802 \u8a93\u54c9 \u6c0f\u3068\u3068\u3082\u306b\u3001\u786c\u8cea\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306e\u4e00\u7a2e\u3067\u3042\u308b\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u72b6\u70ad\u7d20\u8584\u819c\u8868\u9762\u306b\u3001\u5149\u306e\u6301\u7d9a\u6642\u9593\u304c7\u30d5\u30a7\u30e0\u30c8\u79d2\uff08\u539a\u3055\u306b\u3057\u30662 \u03bcm\uff09\u306e\u30ec\u30fc\u30b6\u30fc\u5149\u3092\u7167\u5c04\u3059\u308b\u3060\u3051\u3067\u3001\u5468\u671f\u304c60 nm\u306e\u30ca\u30ce\u69cb\u9020\u4f53\u3092\u8868\u9762\u304b\u3089\u76f4\u63a5\u524a\u308a\u51fa\u305b\u308b\u73fe\u8c61\u306e\u539f\u56e0\u304c\u3001\u6975\u8584\u306e\u96fb\u5b50\u5c64\u306b\u767a\u751f\u3057\u305f\u77ed\u8ddd\u96e2\u4f1d\u642c\u578b\u8868\u9762\u30d7\u30e9\u30ba\u30e2\u30f3\u30fb\u30dd\u30e9\u30ea\u30c8\u30f3[\u6ce8]\u3067\u3042\u308b\u3053\u3068\u3092\u3064\u304d\u3068\u3081\u307e\u3057\u305f\u3002\u3053\u306e\u73fe\u8c61\u3092\u3046\u307e\u304f\u5229\u7528\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u8fd1\u8d64\u5916\u306e\u30ec\u30fc\u30b6\u30fc\u5149\u3067\u3082\u5468\u671f\u30b5\u30a4\u30ba\u3092\u6570nm\u304b\u3089\u657010 nm\u3067\u5236\u5fa1\u3067\u304d\u308b\u65b0\u3057\u3044\u5fae\u7d30\u52a0\u5de5\u6280\u8853\u3078\u3068\u767a\u5c55\u3059\u308b\u3053\u3068\u304c\u671f\u5f85\u3055\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<p>A phenomenon has been reported in which nanostructures with a period of 60 nm can be shaved directly from the surface of a diamond-like carbon thin film, a type of hard ceramic, simply by irradiating a laser beam with a duration of 7 femtoseconds. Miyaji Lab discovered that the cause of this phenomenon is a short-range propagating surface plasmon polariton generated in an ultrathin electron layer. This phenomenon is expected to lead to a new microfabrication technology in which the period size can be controlled from a few nm to several tens of nm even with near-infrared laser light.<\/p>\n\n\n\n<figure class=\"wp-block-image size-full\"><img data-recalc-dims=\"1\" loading=\"lazy\" decoding=\"async\" width=\"810\" height=\"630\" data-attachment-id=\"1845\" data-permalink=\"https:\/\/tuat-chemphys.net\/?attachment_id=1845\" data-orig-file=\"https:\/\/i0.wp.com\/tuat-chemphys.net\/wp-content\/uploads\/2022\/02\/2021-miyajiLab.png?fit=952%2C740&amp;ssl=1\" data-orig-size=\"952,740\" data-comments-opened=\"1\" data-image-meta=\"{&quot;aperture&quot;:&quot;0&quot;,&quot;credit&quot;:&quot;&quot;,&quot;camera&quot;:&quot;&quot;,&quot;caption&quot;:&quot;&quot;,&quot;created_timestamp&quot;:&quot;0&quot;,&quot;copyright&quot;:&quot;&quot;,&quot;focal_length&quot;:&quot;0&quot;,&quot;iso&quot;:&quot;0&quot;,&quot;shutter_speed&quot;:&quot;0&quot;,&quot;title&quot;:&quot;&quot;,&quot;orientation&quot;:&quot;0&quot;}\" data-image-title=\"2021-miyajiLab\" data-image-description=\"\" data-image-caption=\"\" data-large-file=\"https:\/\/i0.wp.com\/tuat-chemphys.net\/wp-content\/uploads\/2022\/02\/2021-miyajiLab.png?fit=810%2C630&amp;ssl=1\" src=\"https:\/\/i0.wp.com\/tuat-chemphys.net\/wp-content\/uploads\/2022\/02\/2021-miyajiLab.png?resize=810%2C630&#038;ssl=1\" alt=\"\" class=\"wp-image-1845\" srcset=\"https:\/\/i0.wp.com\/tuat-chemphys.net\/wp-content\/uploads\/2022\/02\/2021-miyajiLab.png?w=952&amp;ssl=1 952w, https:\/\/i0.wp.com\/tuat-chemphys.net\/wp-content\/uploads\/2022\/02\/2021-miyajiLab.png?resize=300%2C233&amp;ssl=1 300w, https:\/\/i0.wp.com\/tuat-chemphys.net\/wp-content\/uploads\/2022\/02\/2021-miyajiLab.png?resize=768%2C597&amp;ssl=1 768w\" sizes=\"auto, (max-width: 810px) 100vw, 810px\" \/><\/figure>\n\n\n\n<p>Detail \u8a73\u7d30: <em>Journal of Applied Physics<\/em> (2021)<em> <\/em><a href=\"https:\/\/doi.org\/10.1063\/5.0069301\" target=\"_blank\" rel=\"noreferrer noopener\">Sub-100-nm periodic nanostructure formation induced by short-range surface plasmon polaritons excited with few-cycle laser pulses<\/a> (<em>Yuto Iida, Seiya Nikaido, and Godai Miyaji<\/em>)<\/p>\n\n\n\n<p><strong>\u8868\u9762\u30d7\u30e9\u30ba\u30e2\u30f3\u30fb\u30dd\u30e9\u30ea\u30c8\u30f3\uff1a<\/strong><br>\u96fb\u5b50\u306e\u7c97\u5bc6\u632f\u52d5\u6ce2\u30022\u3064\u306e\u7269\u8cea\u306e\u5883\u754c\u9762\u306b\u5b58\u5728\u3057\u3001\u96fb\u78c1\u6ce2\u3068\u7d50\u3073\u3064\u3044\u3066\u3044\u308b\u3002\u6ce2\u9577\u306f2\u3064\u306e\u7269\u8cea\u306e\u8a98\u96fb\u7387\u306b\u4f9d\u5b58\u3059\u308b\u305f\u3081\u3001\u30ec\u30fc\u30b6\u30fc\u5149\u306e\u6ce2\u9577\u3088\u308a\u3082\u77ed\u304f\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002<\/p>\n\n\n\n<p><strong>Surface plasmon polariton:<\/strong> a coarse oscillating wave of electrons. It exists at the interface between two substances and is associated with electromagnetic waves. Since the wavelength depends on the dielectric constant of the two materials, the wavelength can be shorter than that of the laser light.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u8fd1\u8d64\u5916\u306e\u30ec\u30fc\u30b6\u30fc\u5149\u3067\u3082\u5468\u671f\u30b5\u30a4\u30ba\u3092\u6570nm\u304b\u3089\u657010 nm\u3067\u5236\u5fa1\u3067\u304d\u308b\u65b0\u3057\u3044\u5fae\u7d30\u52a0\u5de5\u6280\u8853\u3078\u3068\u767a\u5c55\u3059\u308b\u3053\u3068\u304c\u671f\u5f85\u3055\u308c\u307e\u3059\u3002Leading to a new microfabrication technology in which the period size can be controlled from a few nm to several tens of nm even with near-infrared laser light.<\/p>\n","protected":false},"author":2,"featured_media":1845,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"advanced_seo_description":"","jetpack_seo_html_title":"","jetpack_seo_noindex":false,"jetpack_post_was_ever_published":false,"_jetpack_newsletter_access":"","_jetpack_dont_email_post_to_subs":false,"_jetpack_newsletter_tier_id":0,"_jetpack_memberships_contains_paywalled_content":false,"_jetpack_memberships_contains_paid_content":false,"footnotes":"","jetpack_publicize_message":"","jetpack_publicize_feature_enabled":false,"jetpack_social_post_already_shared":true,"jetpack_social_options":{"image_generator_settings":{"template":"highway","default_image_id":0,"font":"","enabled":false},"version":2}},"categories":[9],"tags":[14],"class_list":["post-1844","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-research","tag-advanced-materials-creation"],"jetpack_publicize_connections":[],"jetpack_featured_media_url":"https:\/\/i0.wp.com\/tuat-chemphys.net\/wp-content\/uploads\/2022\/02\/2021-miyajiLab.png?fit=952%2C740&ssl=1","jetpack_sharing_enabled":true,"jetpack-related-posts":[{"id":6478,"url":"https:\/\/tuat-chemphys.net\/?p=6478","url_meta":{"origin":1844,"position":0},"title":"Eco-friendly AgBiS\u2082 nanocrystals with photodetector performance. \u74b0\u5883\u306b\u3084\u3055\u3057\u3044AgBiS\u2082\u30ca\u30ce\u7d50\u6676\u3092\u958b\u767a\u3001\u5149\u96fb\u5b50\u30c7\u30d0\u30a4\u30b9\u306e\u672a\u6765\u306b\u671f\u5f85","author":"unet","date":"2025-08","format":false,"excerpt":"\u4eca\u5f8c\u306f\u3001\u30ca\u30ce\u7d50\u6676\u306e\u30b5\u30a4\u30ba\u5236\u5fa1\u6280\u8853\u306e\u958b\u767a\u3092\u9032\u3081\u3001\u74b0\u5883\u306b\u914d\u616e\u3057\u305f\u9ad8\u6027\u80fd\u5149\u96fb\u5b50\u30c7\u30d0\u30a4\u30b9\u306e\u5b9f\u73fe\u3092\u76ee\u6307\u3057\u307e\u3059\u3002Future work will focus on developing size control techniques for nanocrystals to realize environmentally friendly, high-performance optoelectronic devices.","rel":"","context":"In &quot;Research Topics&quot;","block_context":{"text":"Research Topics","link":"https:\/\/tuat-chemphys.net\/?cat=9"},"img":{"alt_text":"","src":"https:\/\/i0.wp.com\/tuat-chemphys.net\/wp-content\/uploads\/2025\/08\/image.png?fit=600%2C472&ssl=1&resize=350%2C200","width":350,"height":200,"srcset":"https:\/\/i0.wp.com\/tuat-chemphys.net\/wp-content\/uploads\/2025\/08\/image.png?fit=600%2C472&ssl=1&resize=350%2C200 1x, https:\/\/i0.wp.com\/tuat-chemphys.net\/wp-content\/uploads\/2025\/08\/image.png?fit=600%2C472&ssl=1&resize=525%2C300 1.5x"},"classes":[]},{"id":7779,"url":"https:\/\/tuat-chemphys.net\/?p=7779","url_meta":{"origin":1844,"position":1},"title":"\u5f53\u5b66\u79d1\u306e\u300c\u91cf\u5b50\u6280\u8853\u300dQuantum technology research at our department","author":"unet","date":"2026-04","format":false,"excerpt":"\u91cf\u5b50\u306e\u4e16\u754c\u306f\u3001\u7269\u7406\u3084\u5316\u5b66\u306e\u300c\u5f53\u305f\u308a\u524d\u300d\u304c\u901a\u3058\u306a\u3044\u4e0d\u601d\u8b70\u306a\u5834\u6240 The \"Quantum-Tech\" tag, highlighting our lineup of researchers pushing the boundaries of what is scientifically possible.","rel":"","context":"In &quot;Event\/News&quot;","block_context":{"text":"Event\/News","link":"https:\/\/tuat-chemphys.net\/?cat=4"},"img":{"alt_text":"","src":"https:\/\/i0.wp.com\/tuat-chemphys.net\/wp-content\/uploads\/2026\/04\/Gemini_Generated_Image_tnsv0ctnsv0ctnsv.png?fit=1200%2C655&ssl=1&resize=350%2C200","width":350,"height":200,"srcset":"https:\/\/i0.wp.com\/tuat-chemphys.net\/wp-content\/uploads\/2026\/04\/Gemini_Generated_Image_tnsv0ctnsv0ctnsv.png?fit=1200%2C655&ssl=1&resize=350%2C200 1x, https:\/\/i0.wp.com\/tuat-chemphys.net\/wp-content\/uploads\/2026\/04\/Gemini_Generated_Image_tnsv0ctnsv0ctnsv.png?fit=1200%2C655&ssl=1&resize=525%2C300 1.5x, https:\/\/i0.wp.com\/tuat-chemphys.net\/wp-content\/uploads\/2026\/04\/Gemini_Generated_Image_tnsv0ctnsv0ctnsv.png?fit=1200%2C655&ssl=1&resize=700%2C400 2x, 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https:\/\/i0.wp.com\/tuat-chemphys.net\/wp-content\/uploads\/2025\/10\/image.png?fit=711%2C1005&ssl=1&resize=525%2C300 1.5x, https:\/\/i0.wp.com\/tuat-chemphys.net\/wp-content\/uploads\/2025\/10\/image.png?fit=711%2C1005&ssl=1&resize=700%2C400 2x"},"classes":[]},{"id":6688,"url":"https:\/\/tuat-chemphys.net\/?p=6688","url_meta":{"origin":1844,"position":3},"title":"\u539f\u5b50\u30b9\u30d4\u30f3\u306e\u6e2c\u5b9a\uff1a\u30bb\u30b7\u30a6\u30e0\u539f\u5b50\u3078\u306e\u65b0\u305f\u306a\u6d1e\u5bdf Measuring the Atomic Spins: New Insights into Cesium Atoms","author":"unet","date":"2025-09","format":false,"excerpt":"\u5438\u53ce\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0\u624b\u6cd5\u3001\u3053\u306e\u6280\u8853\u306f\u91cf\u5b50\u6280\u8853\u306e\u767a\u5c55\u3068\u5b9f\u7528\u5316\u306b\u91cd\u8981\u306a\u8ca2\u732e\u3092\u3059\u308b\u3053\u3068\u304c\u671f\u5f85\u3055\u308c\u307e\u3059\u3002The absorption monitoring method: This technology is expected to make important contributions to the development and practical application of quantum technologies.","rel":"","context":"In &quot;Research Topics&quot;","block_context":{"text":"Research Topics","link":"https:\/\/tuat-chemphys.net\/?cat=9"},"img":{"alt_text":"","src":"https:\/\/i0.wp.com\/tuat-chemphys.net\/wp-content\/uploads\/2025\/09\/image-1.png?fit=1117%2C660&ssl=1&resize=350%2C200","width":350,"height":200,"srcset":"https:\/\/i0.wp.com\/tuat-chemphys.net\/wp-content\/uploads\/2025\/09\/image-1.png?fit=1117%2C660&ssl=1&resize=350%2C200 1x, https:\/\/i0.wp.com\/tuat-chemphys.net\/wp-content\/uploads\/2025\/09\/image-1.png?fit=1117%2C660&ssl=1&resize=525%2C300 1.5x, https:\/\/i0.wp.com\/tuat-chemphys.net\/wp-content\/uploads\/2025\/09\/image-1.png?fit=1117%2C660&ssl=1&resize=700%2C400 2x, https:\/\/i0.wp.com\/tuat-chemphys.net\/wp-content\/uploads\/2025\/09\/image-1.png?fit=1117%2C660&ssl=1&resize=1050%2C600 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&quot;Awards&quot;","block_context":{"text":"Awards","link":"https:\/\/tuat-chemphys.net\/?cat=3"},"img":{"alt_text":"","src":"https:\/\/i0.wp.com\/tuat-chemphys.net\/wp-content\/uploads\/2025\/11\/image-6.png?fit=351%2C838&ssl=1&resize=350%2C200","width":350,"height":200},"classes":[]},{"id":3764,"url":"https:\/\/tuat-chemphys.net\/?p=3764","url_meta":{"origin":1844,"position":5},"title":"Stem cutting delivers particles to plants! \u830e\u5207\u65ad\u306b\u3088\u308b\u690d\u7269\u3078\u306e\u5fae\u7c92\u5b50\u8f38\u9001\u3001\u65b0\u305f\u306a\u65b9\u6cd5","author":"wl","date":"2023-12","format":false,"excerpt":"\u30ca\u30ce\u7c92\u5b50\u3060\u3051\u3067\u306a\u304f\u30b5\u30d6\u30df\u30af\u30ed\u30f3\u7c92\u5b50\u3082\u8f38\u9001\u53ef\u80fd \ud83c\udf45 \u30c8\u30de\u30c8\u3060\u3051\u3067\u306a\u304f\u4ed6\u306e\u98df\u7269\u4f5c\u7269\u306b\u3082\u9069\u7528\u53ef\u80fd Stem Cutting: A Novel Route for Delivering Sub- and Micrometer-Scale Particles to Plants= This method bypasses 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